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◆Outline

All MNC equipmets are for common use. Every staffs of Tohoku university could use MNC. Other person also could use by contacting laboratories of Tohoku university. Basically, you need to operate equipment yourself after taking operation training from responsible person. You could register MNC anytime and start using MNC equipemt soon. Situation of equipemnt could be comprehended by mailing list.

◆Policy

Our goal is many MNC users could acquire semiconductor integrated circuit fabrication techniques, embody high level reserch, make practical device that could create new industry. For that reason, MNC users need to understand not only how to use but maintain equipment.
We would like to keep easy-to-use equipment and high level reserch by communicaing each other.

◆Registration

After attending MNC safety lecture,(recorded DVD is available)
and pass the MNC license examination,
[MNC license examination (internal only)]

submit the following documents
(1)Application form for project leader (PDF)
(2)Application form for users (PDF)
(3)Staff/student ID card
・Registraion place:MNC3F staff room
・Registration time:10:00~16:00

◆Utility form

Utility form
Basically no restriction. Company person could use MNC as joint reserch with tohoku univrsity.

Theme
No restriction if the theme is proper as university reserch. No examination in MNC.

Application
At any time. All users need application.

Start usage
No restriction. You could start/end at any time.

Usage fee
Expendables fee, equipment usage fee.

Patent
Acquisition of patent is recommended. Please obey the rule of Research form.

◆Room view

MNC micro machining building room view

MNC館内図

◆Main equiments for common use

Introduction of main equipment. Please contact us if you are interested in.
Other equipments are also available. Please refer MNC equipment catalog(PDF) for detail.

Evaluation and Analysis

SEM-EDX

SEM-EDX
FIB

FIB
SIMS

SIMS
XRD

XRD
XPS

XPS
UHV-STM&AFM

UHV-STM&AFM
SPM

SPM
FT-IR

FT-IR
Ellipsometer

エリプソメーター
Micro system analyzer

14GHz network analyzer

14GHz ネットワークアナライザ
Semiconductor parameter analyzer

半導体パラメータアナライザ

Etching

STS ICP RIE

STS ICP RIE
Pegasus Advanced
(Deep RIE)
Pegasus Advanced
ANELVA RIE

ANELVA RIE
XeF2 gas Etcher

XeF<sub>2</sub> gas Etcher
Ion beam milling

Ion beam milling
FAB

FAB

Deposition

Thermal oxidation furnace

パイロ酸化炉
P-TEOS CVD

P-TEOS CVD
TEL LPCVD

TEL LPCVD
Astex diamond CVD

Astex diamond CVD
ANELVA Sputter

ANELVA Sputter
EIKO Sputter

EIKO Sputter
SHIBAURA Sputter

SHIBAURA Sputter
EB evaporation

EB evaporation
PLD

PLD

Lithography

Electron beam writer

電子ビーム描画装置
Laser writer

レーザー描画装置
EVG aligner

アライナー

Bonding

EVG bonder

EVGボンダ
Flip chip bonder

フリップチップボンダ
Wafer bonding inspector

赤外接合評価装置

Others

Ion implantation

イオン注入装置
H2 anneal furnace

水素アニール炉
Dicer

ダイサー